Radiation-hardened programmable device

ABSTRACT

A method of programming a radiation-hardened integrated circuit includes the steps of supplying a prototype device including an SRAM memory circuit or programmable key circuit to a customer, having the customer develop working data patterns in the field in the same manner as a reading and writing to a normal RAM memory, having the customer save the final debugged data pattern, delivering the data pattern to the factory, loading the customer-developed data pattern into memory, programming the customer-developed data pattern into a number of production circuits, irradiating the production circuits at a total dosage of between 300K and 1 Meg RAD to burn the data pattern into memory, and shipping the irradiated and programmed parts to the customer.

RELATED APPLICATION

The present application is a divisional of U.S. patent application Ser.No. 11/132,799 filed May 19, 2005, which is a divisional of U.S. patentapplication Ser. No. 10/045,571 filed Oct. 23, 2001, which is now issuedU.S. Pat. No. 6,917,533, both of which are incorporated herein byreference in their entirety and are assigned to the assignee of thepresent application.

BACKGROUND OF THE INVENTION

This invention relates generally to radiation-hardened integrated memorycircuits or embedded memory circuits, and, more particularly, to a noveltechnique for permanently programming a pattern into the memory.

Radiation is absorbed in materials by two main mechanisms. The primarymechanism is by ionization in which electron-hole pairs are created. Ifthe energy of the radiation is greater than the energy required tocreate an electron-hole pair, ionization can occur. The energy requiredto form an electron-hole pair in silicon is 3.6 eV. For each RAD insilicon, approximately 4.0 E13 electron-hole pairs are formed per cubiccentimeter. The energy required to form an electron-hole pair in silicondioxide is 17 eV. Because of the difference in ionization energy,approximately 4.7-times more pairs are formed in silicon than in silicondioxide for a given dose.

The secondary mechanism is by damage to the lattice structure of thematerial. Typically, lattice damage occurs due to radiation in the formof high energy neutrons, protons and heavy ions. The particle must haveenough energy to break multiple bonds and to move the lattice atom awayfrom its original site.

The interaction of ionizing radiation with materials is fairly complex.But a basic understanding of the effect of the “total dose” radiation onMOS electronics can be gained by examining ionization effects, i.e. thegeneration of electron-hole pairs the gate and field oxides of an MOStransistor.

Ionizing events occur when electrons in the semiconductor's valence bandare raised to the conduction band. A fraction of the electron-hole pairswill undergo geminate (or initial) recombination and cause no damage.Geminate recombination decreases as the electric field increases, andthe electrons and holes that survive it are free to diffuse and driftwithin the oxide where they will be swept from the insulator, recombine,or be trapped.

The trapped charge, particularly the trapped holes, causes much of thedegradation of device parameters by radiation exposure. Indevice-quality silicon dioxide, the electrons move freely out of theoxide whereas the holes are more likely to become trapped. The trappedholes generate space-charge fields in the underlying silicon substrate,resulting in negative shifts in the threshold voltage.

As the threshold voltage shifts negatively, an N-channel transistorbiased in the off-state lets more and more current pass. If enough holesare trapped, the N-channel transistor will remain fully conducting evenwith zero applied gate bias, transforming an enhancement-mode deviceinto a depletion-mode device.

A cross-section of an MOS transistor is shown in FIGS. 1-4. FIG. 1 showsthe transistor before a radiation burst. The transistor includes asilicon substrate 10, N-type source/drain regions 12, an oxide gateregion 14A, and a polysilicon gate 16. In FIG. 2 numerous electron-holepairs generated in the silicon dioxide gate 14B are shown immediatelyafter a radiation burst. In FIG. 3 the holes remaining in the silicondioxide gate 14C are shown after electron transport. In FIG. 4 theremaining trapped final charge is shown in silicon dioxide gate 14D.

While the generation of trapped holes in an N-channel transistor due tototal dose radiation is normally an undesirable effect that must beovercome in radiation hardened circuits, what is desired is a techniquefor programming an integrated circuit having a memory or embedded memoryportion that uses the effect of ionizing radiation to full advantage.

SUMMARY OF THE INVENTION

According to the present invention, a method of programming aradiation-hardened integrated circuit includes the steps of supplying aprototype device to a customer, having the customer develop working datapatterns in the field in the same manner as a reading and writing to anormal RAM memory, having the customer save the final debugged datapattern, delivering the data pattern to the factory, loading thecustomer-developed data pattern into memory, programming thecustomer-developed data pattern into a number of production circuits,irradiating the production circuits at a total typical dosage of between300K and 1 Meg RAD to burn the data pattern into memory, and shippingthe irradiated and programmed parts to the customer.

A second embodiment of the invention uses a programmed key including acoupled N-channel transistor and resistor, or N-channel and P-channeltransistor, both coupled between the VDD power supply and ground. In anintegrated circuit, several programmed keys are provided. Duringradiation, the input node of each of the keys is set high or low and VDDis set to zero volts. During operation, the input to each of the keys isset to zero volts and VDD is turned on. The programmed keys then leak toprovide a programmed output. The output node of the key remains low forthose devices whose gate was previously not programmed, i.e. set to zerovolts during irradiation. The key system can be useful forsurreptitiously determining whether or a not a circuit has beenirradiated above a specified value by using the output to set aninternal flag, for example. In addition, an on-board “kill circuit” canbe used to render a circuit inoperative once a specified value ofradiation has been exceeded.

It is a main feature of the present invention that the harmful effectsof total dose radiation on a silicon-based integrated memory circuit areharnessed to create a useful programming technique.

It is an advantage of the present invention that the programmed andirradiated memory circuits are radiation hardened and further radiationexposure (in a radiation environment such as outer space) only furtherestablishes or enhances the programmed memory pattern.

The foregoing and other objects, features and advantages of theinvention will become more readily apparent from the following detaileddescription of a preferred embodiment of the invention, which proceedswith reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional diagram of a prior art N-channel transistorincluding a substrate, N-type source/drain diffusions, a silicon dioxidegate layer, and a polysilicon gate contact;

FIG. 2 is a cross-sectional diagram of the transistor of FIG. 1immediately after being irradiated showing numerous electron-hole pairsin the silicon dioxide gate layer;

FIG. 3 is a cross-sectional diagram of the transistor of FIG. 2 afterelectron transport, leaving numerous holes trapped in the silicondioxide gate layer;

FIG. 4 is a cross-sectional diagram of the transistor of FIG. 3 showingthe final trapped hole charges in the silicon dioxide gate layer;

FIG. 5 is a plot of transistor current versus gate-to-source voltage foran N-channel transistor in which the gate voltage is set to zero voltsin which the transistor is irradiated at five levels of total doseradiation from 0K RADs to 1 Meg RAD;

FIG. 6 is a plot of transistor current versus gate-to-source voltagefrom zero to one volt for an N-channel transistor in which the gatevoltage is set to 2.7 volts in which the transistor is irradiated atfive levels of total dose radiation from 50K RADs to 2 Meg RAD;

FIG. 7 is a plot of transistor current versus gate-to-source voltagefrom zero to 2.5 volts for an N-channel transistor in which the gatevoltage is set to 2.7 volts in which the transistor is irradiated atfive levels of total dose radiation from 50K RADs to 2 Meg RAD;

FIG. 8 is a plot of a typical SRAM cell suitable for use as aprogrammable memory cell according to the present invention;

FIG. 9 is a block diagram flow chart of the method of the presentinvention;

FIG. 10 is a circuit diagram of a programmable key circuit including anN-channel transistor and a resistor coupled together in asource-follower circuit configuration according to a second embodimentof the invention;

FIG. 11 is a circuit diagram of a programmable key circuit including anN-channel transistor and a resistor coupled together in a common-sourceamplifier configuration according to a second embodiment of theinvention;

FIG. 12 is a circuit diagram of a programmable key circuit including anN-channel transistor and a P-channel transistor coupled together in acommon-source amplifier configuration according to a second embodimentof the invention; and

FIG. 13 is a circuit diagram of a programmable key circuit according toany of the key circuits of FIGS. 10-12 and further including additionalcircuitry such as additional amplifiers or level-shifting circuitry orthe like.

DETAILED DESCRIPTION

Referring now to FIG. 5 a plot of transistor current versusgate-to-source voltage for an N-channel transistor in which the gatevoltage is set to zero volts in which the transistor is irradiated atfive levels of total dose radiation from 0K RADs to 1 Meg RAD is shown.Note that for a gate voltage set to zero volts, the transistor currentresponse is nearly identical for total dose irradiation at the zero,100K, 200K, 300K, and 1 Meg RAD levels. The transistor exhibits a normalcurrent response with current decreasing below VGS voltages of about 0.7volts.

Referring now to FIG. 6 a plot of transistor current versusgate-to-source voltage from zero to one volts for an N-channeltransistor in which the gate voltage is set to 2.7 volts in which thetransistor is irradiated at five levels of total dose radiation from 50KRADs to 2 Meg RAD. Note that for a gate voltage set to zero volts, thetransistor current response splits between a total dose of 100K RADs and300K RADs. At dose irradiation levels of 100K RADs and below, transistorcurrent response is similar to that of the transistor shown in FIG. 5.However, for total dose irradiation levels of 300K RADs and above,transistor current continues (current greater than 1 μA) to persist eventhough VGS voltages are dropped below 0.7 volts. Referring now to FIG. 7a plot of transistor current versus gate-to-source voltage is expandedfrom zero to 2.5 volts is shown for the N-channel transistor of FIG. 6.

Referring now to FIG. 8 a schematic diagram of an SRAM cell 40 having“soft” non-radiation hardened transistors suitable for use as aprogrammable memory cell according to the present invention is shown.SRAM memory cell 40 includes complementary column select or data lines26 and 32, and row select nodes 28 and 34. The core of the SRAM cellincludes cross-coupled P-channel transistors 36 and 18, andcross-coupled N-channel transistors 42 and 20. The current paths oftransistors 36 and 42 are coupled together at node 38 and the currentpaths of transistors 18 and 20 are coupled together at node 22.N-channel pass transistors 24 and 30 transfer the complementary datastate from circuit nodes 38 and 22 to column lines 26 and 32,respectively.

In operation, either of transistors 42 and 20 will have its gate biasedat ground potential, and the other transistor will have its gate biasedat VDD. The transistor having a gate biased to zero volts does notchange during irradiation, but the other transistor having a gate biasedat VDD experiences a voltage threshold shift. The voltage thresholdshift causes the cross-coupled circuit shown in FIG. 8 to be permanentlypre-disposed to a data state, effectively converting the normal “soft”SRAM cell into a radiation-hardened read-only memory cell (as long asthe write line is kept off or low).

Referring now to FIG. 9 a block diagram 50 of the method of the presentinvention is shown. At the first step 52 prototype soft memory devicesare supplied to a customer. At step 54 the customer uses the prototypedevices in his system to develop working data patterns in the field inthe same manner as a reading and writing to a normal RAM memory device.The final debugged data pattern is saved into memory. At step 56 thecustomer delivers the data pattern to the factory so that it can beburned into equivalent commercial devices. At step 58 thecustomer-developed data pattern is loaded into memory at the factory,and the customer-developed data pattern is programmed into a number ofproduction circuits. At step 60 the production circuits are irradiatedat a typical total dosage of between 300K and 1 Meg RAD to burn the datapattern into memory as discussed above. At step 62 a pin-compatibleirradiated and programmed parts are shipped to the customer.

A second embodiment of the programmed and irradiated N-channeltransistor of the present invention is shown in FIG. 10. A programmedkey 70 is shown including an N-channel transistor 74 and resistor 76coupled together in a source-follower amplifier configuration. The maincurrent path of key 70 flows between the VDD power supply and ground.The gate of key 70 is coupled to the input terminal 72, designated KeyI.The junction of N-channel transistor 74 and resistor 76 forms the outputnode 78 labeled VO. The method of the present invention can be used toprovide a series of programmed keys 70, one of which is shown in FIG.10. During radiation, the input node of keys 70 are set high or low andVDD is set to zero volts. During operation, the input 72 to keys 70 areset to zero volts and VDD is turned on. The programmed keys leak toprovide a programmed output at node 78. For example, if resistor 76 isset to 2.5 MegΩ, and the leakage current of N-channel is approximatelyone micro-amp, then the output node 78 should approach the power supplyvoltage of 2.5 volts (within a threshold voltage) for the previouslyprogrammed devices. The output node 78 remains low for those deviceswhose gate was previously not programmed, i.e. set to zero volts duringirradiation. The key system shown in FIG. 10 can be useful forsurreptitiously determining whether or a not a circuit has beenirradiated above a specified value by using the output at node 78 to setan internal flag, for example. In addition, an on-board “kill circuit”could be used to render a circuit inoperative once a specified value ofradiation has been exceeded using the output voltage signal at node 78.

FIGS. 11-13 illustrate alternative configurations to the programmablekey circuit 70 shown in FIG. 10 according to a second embodiment of thepresent invention, although the output signal polarity of the circuitsis inverted from key circuit 70. FIG. 11 is a circuit diagram of aprogrammable key circuit 80 including an N-channel transistor 74 and aresistor 76 coupled together in a common-source amplifier configuration.FIG. 12 is a circuit diagram of a programmable key circuit 90 includingan N-channel transistor 72 and a P-channel transistor 82 coupledtogether in a common-source amplifier configuration. FIG. 13 is acircuit diagram of a programmable key circuit using any of theprogrammable key circuits 70, 80, or 90 and further including additionalcircuitry such as additional amplifiers 100 or level-shifting circuitry110 or the like.

Having described and illustrated the principle of the invention in apreferred embodiment thereof, it is appreciated by those having skill inthe art that the invention can be modified in arrangement and detailwithout departing from such principles. For example, while a typicaleffective dosage range of between 300K and 1 Meg RAD is suggested forproper operation of the invention, the exact dosage range can beadjusted as required for a particular application or semiconductorprocess as long as the programmed corresponding leakage current is aboutone micro-amp. We therefore claim all modifications and variationscoming within the spirit and scope of the following claims.

1. A method of converting a soft SRAM memory into a radiation hardenedread-only memory, the method comprising: programming a data pattern intoan SRAM memory; irradiating a transistor in the SRAM memory having agate biased at VDD to provide a voltage threshold shift at a typicaltotal dosage of between 300K and 1 Meg RAD in order to burn the datapattern into memory.
 2. The method of claim 1 further comprisingshipping the irradiated and programmed SRAM memory to the customer.
 3. Aprogrammable key method comprising: providing a plurality of keycircuits; writing a data pattern into a plurality of key circuits; andirradiating a transistor in the key circuits having a gate biased at VDDto provide a voltage threshold shift at a typical total dosage ofbetween 300K and 1 Meg RAD in order to burn the data pattern into thekey circuits.
 4. The method of claim 3 in which providing a plurality ofkey circuits comprises providing a plurality of circuits each includingan N-channel transistor and a resistor coupled together in asource-follower amplifier configuration.
 5. The method of claim 3 inwhich providing a plurality of key circuits comprises providing aplurality of circuits each including an N-channel transistor and aresistor coupled together in a common-source amplifier configuration. 6.The method of claim 3 in which providing a plurality of key circuitscomprises providing a plurality of circuits each including an N-channeltransistor and a P-channel transistor coupled together in acommon-source amplifier configuration.